 |
 |
~500mm 大面积表面处理 |
|
 |
迅速的处理 : ~50mm/s |
|
 |
对大面积做均匀的护膜 |
|
 |
大气压 in-line process |
|
 |
Fluorocarbon 剥膜 |
|
 |
Aging time : 1 年以上 |
|
 |
Nano layer 剥膜 : 1~20mm |
|
 |
便于厚度调整 |
|
 |
耐化学性、耐酸性 |
|
 |
发液成分
(water, silicon resin, acrylesin など) |
|
|
|
 |
|
Nanoimprint-Hot embossing, UV imprint |
|
|
Micro contact printing |
|
|
Ink jet printing |
|
|
BioMEMS (u-Fluidics) |
|
|
MEMS device (u-Machines) |
|
|
Patterning (Bio chip, Display) |
|
|
Optic device
(Mirror, Glass, Lens, Film) |
|
|
Electrowetting |
|
|
Electric paper |
|
|
Fuel cell, Solar cell |
|
|
|
|
|
|
|
IHP
1000 |
|
|
|
|
 IHP 1000
|
|
|
AC 200V, 50/60 Hz
|
|
|
300 w
|
|
|
13.56 MHz
|
|
|
Ar, He
|
|
|
O2 , N2
|
|
|
0~50 度
|
|
|
0~90 %
|
|
|
空冷式
|
|
|
1500mm
|
|
|
100 mm/s
|
|
|
ball Convayor
|
|
|
DC servo & Stepping
|
|
|
PLC / 12" touch screen
|
|
|
Scan type
|
|
|
1000(L)x815(W)x1350(H)
|
|
|
100 Kg
|
|
|
|
|
|
|
SHP
1000 |
|
|
|
|
SHP 1000
|
|
|
|
AC 200V, 50/60 Hz
|
|
|
|
600 w
|
|
|
|
13.56 MHz
|
|
|
|
Ar, He
|
|
|
|
O2 , N2 ,Ar/CH4, CF4, H2
|
|
|
|
0~50 度
|
|
|
|
0~90 %
|
|
|
|
空冷式
|
|
|
|
150mm
|
|
|
|
100 mm/s
|
|
|
|
ball Convayor
|
|
|
|
DC servo & Stepping
|
|
|
|
PLC / 12" touch screen
|
|
|
|
Scan type
|
|
|
|
1000(L)x815(W)x1350(H)
|
|
|
|
100 Kg
|
|
|
|
|
大气压疏水性装备
